Looking to take your short path system to the next level? A diffusion pump will provide deeper vacuum and lower temps resulting in higher efficiency and increased speed.
Package comes with an Edwards 30 roughing pump, the adapters to connect the diffusion, chiller to control temperatures and custom built and tuned SVG-3 setup with UHVP Sensor.
- High rate Diffusion Pump
- Adapters to fit
- 3/4 HP Chiller
- E2M30 kit
- SVG-3 (3 zone gauge)
- UHVP Sensor
LIMITED SUPPLY
Setups do vary, please call for pricing.